PENENTUAN DENSITAS PLASMA HIDROGEN NONTERMAL PADA TEKANAN RENDAH

Abstract

Before producing hydrogen plasma low pressure in experiment, it is necessary to know the density equilibrium process through a simulation. Hydrogen species densities of non-thermal plasma at low pressure is simulated using chemical kinetik model by Runge Kutta method. This simulation carried out to determine the equilibrium process of densities and reaction rates of hydrogen species in achieving equilibrium conditions. The equation used time-dependent continuity equation and Arrhenius form. The hydrogen species consist of electrons, H, H₂, H⁺ and H₂⁺. The results of show that electron density, H, H₂, H⁺ and H₂⁺ are respectively 10^20,23m^-3, 10^19,69m^-3, 10^19,91m^-3, 10^19,39m^-3 and 10^18,43m^-3 during of 23-24 ns. These describe that the density of each species of hydrogen very fast to achieve equilibrium conditions, while the value of the reaction rate obtained can be concluded that the value of the largest reaction rate is the impact ionization process with a value of 9.86x10⁵²m^-3 s^-1and the smallest one is dissociation process with a value of 1.22x10^-5m^-3 s^-1.