PEMBUATAN FILM TIPIS BARIUM STRONTIUM TITANAT (Ba0,6Sr0,4TiO3) MENGGUNAKAN METODE SOL-GEL DAN KARAKTERISASI MENGGUNAKAN SPEKTROSKOPI IMPEDANSI

Abstract

Fabrication of thin film from material barium strontium titanat (Ba0,6Sr 0,4TiO3) that is annealing
at a temperature of 6000C and 650°C has been carried out. Samples are made by using the solgel
method, then characterized by using Field Emission Scanning Microscopy (FESEM) and
Impedance Spectroscopy. Results of FESEM for samples at temperature 6000C and 650°C have
thickness of 102,7 nm and 245,7 nm. The impedance spectroscopy characterization uses
frequency at 100 Hz up to 1 MHz to get real impedance value and imaginer value for
determining complex impedance, complex capacitance, dielectric constant. The complex
impedance values for both temperature 600°C and 650°C is 2061,4 Ω dan 4684,3 Ω. The
complex capacitance values for both temperature of 6000C and 650°C are 7,72x10-7 Farad and
3,4x10-7 Farad. The value of the relative dielectric constant at temperature of 6000C and 650°C
are 52,9 and 55,6 respectively.