KARAKTERISASI DAN PEMBUATAN FILM TIPISBARIUM STRONTIUM TITANAT Ba0,7Sr0,3TiO3 (BST)MENGGUNAKAN METODE SOL-GEL

Abstract

The thin film of Barium Strontium Titanate (BST) has been studied with composition of, , by using sol-gel method that annealed in temperature of 600oC and 650oC. The thinfilm of BST is characterized by using Field Emission Scanning Electron Microscopy (FESEM) and animpedance spectroscopy. The result samples in temperature of 600oC and 650oC are 46 nm and 141nm in thickness respectively. The result of impedance spectroscopy characterization given frequencyvalues obtained by the impedance value of real and imaginary. The capacitance of the thin film ofBST in temperature of 600oC and 650oC are 75.46 F dan 154.69 F. The dielectric constant of the thinfilm of BST in temperature of 600oC and 650oC are 23.98 and 148.40 respectively.